Abstract

This article presents a monolithically zone-addressable 20 × 20 940 nm vertical-cavity surface-emitting laser (VCSEL) array with a binary number pattern design for sensing applications. The emitters in this VCSEL array have a uniquely designed binary pattern design, with each row representing a 5-bit pattern designed to aid pattern-matching algorithms to deduce the shape and depth information efficiently. Approximately 200 VCSELs are arranged in four individually addressable light-emitting zones, with ∼50 emitters in each zone. Each zone generates laser pulses up to 7.2 W in peak power.

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