Young's modulus and stress of CrN deposited by cathodic vacuum arc evaporation

Abstract

It is generally recognized that a high degree of ionization which is a characteristic of the cathodic vacuum arc evaporation (CVAE) process is necessary to form the chromium mononitride in single-phase or near-single-phase condition. This study concerns the properties of CVAE chromium nitride coatings made at low temperature (200°C) and at a more usual industrial temperature (400°C). A phase analysis is made followed by a derivation of the residual stress. The Young's modulus of the coating was derived from a series of coatings on various substrates. The modulus value of 232–244 GPa is well below the 400 GPa which is often cited.