Abstract
ErBa 2Cu 3O 7− x superconducting thin films prepared on MgO single-crystal substrates by RF magnetron sputtering were irradiated with X-rays emitted from an Rh X-ray tube for 100 h. The superconducting properties were damaged to disappear the zero-resistance state and then were recovered by oxygen annealing at 450°C. No change in the crystallinity causing the radiation damage was observed in the X-ray diffraction patterns. The X-ray photoemission spectra showed that the mean Cu valence was close to +1 after the irradiation and was increased to about +2 by the annealing. The X-ray irradiation must induce oxygen vacancies, which can be filled by the oxygen annealing.
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