X-ray characterization of Au/Ni multilayer thin films

Abstract

Au/Ni multilayer thin films of single phase structure were analyzed using kinematic X-ray diffraction theories to determine the composition modulation and structure of this multilayer system. The repeat period of the multilayers used in this study ranged from 0.82 × 10 −9m to 4.26 × 10 −9m. The composition modulation was found to be a near square wave. The strain at the AuNi interface is predicted to be 9.8% at repeat period 1.65 × 10 −9m with decreasing values above and below this repeat period.