Abstract
The authors present a detailed x-ray dynamical diffraction analysis of metamorphic InxGa1-xAs/InyGa1-yAs superlattices grown epitaxially on GaAs (001) substrates. The x-ray rocking curve analysis was conducted for a number of hkl reflection profiles, including 004, 115, 026, and 117, assuming Cu kα1 radiation, by using the mosaic crystal model for dynamical diffraction. The authors show that the threading dislocation density in the superlattice can be estimated from nondestructive x-ray rocking curve measurements, by observing the superlattice peak widths.
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Schedule a callMore From: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
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