Abstract
Ultrashort laser processing has great potential for precise microfabrication of transparent materials. For optimizing laser parameters, the quick survey of laser parameters is vital. We have developed Yb-doped fiber chirped-pulse amplification system that can control various laser parameters in a wide range (pulse duration: 0.4 to 400 ps, etc.). The laser micro-drilling and imaging under 450 conditions were performed for about 0.5 hour, the 2D mapping of ablation volume with pulse duration and fluence was also accomplished by automatic confocal laser scanning microscopic measurements for several hours. The fast and comprehensive survey of ultrafast laser processing of glasses was demonstrated.
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