Ultrafast laser processing of ceramics: Comprehensive survey of laser parameters

Abstract

The productivity and quality of laser micromachining depend on multiple laser parameters that are intricately correlated. For these optimizations, a quick survey of laser parameters is vital. Recently, the authors developed a Yb-doped fiber chirped-pulse amplification system that can control various laser parameters in a wide range (pulse duration: 0.4–400 ps, repetition: single shot to 1 MHz, etc.). In this work, using this laser system, percussion microdrilling of three types of advanced ceramics, AlN, Al2O3, and Y2O3-doped ZrO2, was explored. In the case of the microdrilling of the Al2O3 ceramic, the ablation volume increased about 2–3 times as the pulse repetition increased from 100 Hz to 1 MHz. This suggests a different mechanism because the volume removal became dominant at 1 MHz. Scanning electron microscope observation confirmed a drastic melt formation at 1 MHz. From these, there is an additional volume removal due to the heat accumulation by multipulse irradiation on the Al2O3 ceramic at a higher repetition rate. It was also found that the variation of ablation volume with the pulse duration and fluence exhibited a big difference among these ceramics. A comprehensive survey of ultrafast laser ablation of ceramics was demonstrated.