Abstract
The use of lead β-diketonates as precursors in the CVD of many ferroelectric, pyroelectric, and superconducting oxide films is attracting increasing interest. This paper reports on the vapor pressures, decomposition characteristics, and possible reaction mechanisms for a number of such lead complexes, and investigates their use for the CVD of lead oxide films. The Figure shows an SEM of a PbO film from one of the precursors.
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