Abstract
The objective of this paper is to gain a deeper understanding of the vibration characteristics on the surface of a new disc-type ultrasonic stator for possible application to a moving object. By using the laser heterodyne technique, we can identify the vibration displacement and velocity patterns of the stator. Furthermore, the sensitivity is acquired from the measurement data. As a result, we find that the stator can produce a levitation motion on the surface of the stator. However, this is better for a lateral motion than a planar levitation.
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