Measurement of Deflection of Vibrating Mirror by Laser Heterodyne Technique

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Measurement of deflection of vibrating mirrors by the laser heterodyne technique is described. The vibrating mirrors were driven by piezoelectric vibrators whose resonant frequencies were 16.5 and 11.6 kHz respectively. The laser heterodyne technique was used for a small vibration amplitude range (the deflection less than O.13μm). The results were compared with those results for a relatively large vibration amplitude range (the deflection about 1μm or less) which were measured by the laser interferometry method. It is shown that both results are consistent with each other and give information about the boundary conditions of the vibrating mirrors when compared with the theoretical deflection of a vibrating disk.