Abstract
Abstract An electrochemical pn etch-stop technique is described in which the pn-junction is formed by diffusion and/or ion implantation. With more than one diffusion, a vertical membrane structure can be obtained such that the thinner membranes are suspended on thicker rims of arbitrary shape. The transition from a thick to a thin membrane has rounded contours, which are not dependent on crystal direction. An improvement of the stability of the suspension of very thin membranes is thereby achieved.
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