Vertical co-integration of AlSi MEMS tunable capacitors and Cu inductors for tunable LC blocks

Abstract

This paper describes a new process for the vertical co-integration of AlSi MEMS tunable capacitors and thick-Cu high-Q inductors. Tunable area MEMS capacitors with fragmented electrodes and with both thermal and electrostatic actuators are designed and validated. Thick copper layers are used for a double purpose: (i) to design and fabricate vertically integrated high-Q inductors and (ii) to define lateral electrostatic actuators for the MEMS capacitors. The achievable performances and flexibility associated with the new process to fabricate LC tanks are finally discussed.