Abstract
High quality tunable MEMS parallel plate capacitors have been widely used in phase shifters, oscillators and tunable filters for wireless communication. As electrostatic actuation and air dielectrics have led to devices with low power consumption and high quality factors, an electrostatically actuated MEMS tunable capacitor with two flexible plates have been designed and fabricated in this paper. According to the measurement results, tunable capacitor shows good performance in the frequency range of 2GHz-10GHz. The pull-in voltage for the capacitor is 13 V. The tuning ratio of the capacitor is very high, which can reach 320%.
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