Abstract
This study presents vertical Ga2O3 Schottky barrier diodes (SBDs) with a staircase field plate on a deep trench filled with SiO2. It was clarified from device simulation that at high reverse voltage operation, the staircase field plate and the deep trench can effectively alleviate electric field concentration in the Ga2O3 drift layer and the SiO2 layer, respectively. The Ga2O3 SBDs successfully demonstrated superior device characteristics typified by an on-resistance of 7.6 mΩ cm2 and an off-state breakdown voltage of 1.66 kV. These results offer the availability of the trench staircase field plate as an edge termination structure for the development of Ga2O3 SBDs.
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