Abstract

In this paper, time constants of random telegraph noise (RTN) are extracted and their implications on trap positions (X T /T ox ) and energy levels (E T ) are investigated in detail. By using the Hidden Markov Model (HMM), the distribution variations of RTN trap location and energy level are analyzed under various experimental conditions. The results indicate that the extracted trap locations and energy levels by HMM have large variations, with a potential range from +53% to −23% around the average. This work provides important data to show that HMM-related variations should be well considered when we study the trap properties.

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