Vacuum pump age effects by the exposure to the corrosive gases on the Cr etch rate as observed using optical emission spectroscopy in an Ar/O2/Cl2 mixed plasma

Abstract

Vacuum pumps of different ages were used to prepare Cl2 based plasmas for use in Cr etching. The effects of the vacuum pump age on the etching results were investigated using optical emission spectroscopy analysis. The composition of gas at the base pressure was mainly nitrogen and oxygen, although the ratio depended on the vacuum pump age and therefore, modulated the etch rate in a manner that was difficult to monitor. The effects of the pump age on the etch rate were clearly observed in the Cl2 plasma-assisted chromium film etching process, in which oxygen and chlorine radicals were responsible for the etching process. The electron energy distribution function (EEDF), which provided a proxy for the thermal equilibrium properties of the etching plasmas, was monitored. The shape of EEDF was derived from an analysis of the optical emission spectral data using an analysis model described previously. Because molecular nitrogen has a higher threshold energy and a larger cross-section of inelastic collisional processes than oxygen, the tail of the EEDF depends on the mixing ratio between nitrogen and oxygen. The various mechanisms that contribute to the chromium etch rate varied with subtle differences in the vacuum conditions, which were determined by age of the turbo molecular pump. The rates at which oxygen and chlorine radicals were generated were estimated using the measured EEDF, and the estimated oxygen radical and etching product contents were verified by comparing the residual gas analyzer data. The results revealed that the residual nitrogen partial pressures in two etchers equipped with either a new or an aged pump differed by 0.18%, and the EEDF tail areas differed by 10−4. Importantly, the chromium etch rates in these two instruments differed by 30%. These results suggest that the chamber-to-chamber mismatch should be monitored during plasma-assisted device fabrication processes.