Consideration of the electron energy distribution function shape in a Ar and N2 global model

Abstract

This paper presents a method to compensate the effects of the electron energy distribution function (EEDF) shape on plasma characteristics when using global models to describe Ar and N2 inductively coupled discharges. A non-Maxwellian global model is developed for the pressure range 1-1000 mTorr by using an user-friendly Boltzmann equation solver to calculate the EEDF. The calculated EEDFs are compared with the measurements performed with a single Langmuir probe in the same conditions. We also compare the calculated results by using the Boltzmann equation solver with the results by assuming a Maxwellian EEDF and point out the influence of both methods on the contribution of the multi-step process on ionization. Finally, to take into account the shape of the EEDF in global models, abacuses are presented as a function of the absorbed power density and the pressure for typical Ar and N2 planar ICP discharges.