Abstract
Silicon micromechanical resonators have been designed to have a quality factor (Q) that is a strong function of temperature. This is an ideal sensor for the temperature of the resonator—it is instantaneous, consumes no power, and indicates the temperature of the resonator structure with high sensitivity. The authors present a practical implementation of an oscillator system using these resonators with a temperature resolution of better than 0.002°C. The Q(T) signal is uniquely suited for implementing feedback control of the resonator temperature, thereby stabilizing the frequency silicon micromechanical resonators and enabling their use in high-stability frequency reference applications.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.