Abstract
We applied Er 2O 3 nanoparticles, P 2O 5 particles, and spin-on-glass (SOG) solution to form erbium-doped silica thin films exhibiting photoluminescence at 1530 nm. We further investigated the annealing condition and composition of the spin-coated film. The addition of P 2O 5 improved PL peak intensity of the erbium-doped film fivefold. The weight ratio of Er 2O 3 nanoparticles to P 2O 5 particles in the SOG was found to be 0.54 for efficient light emission.
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