Using AFM to measure the elastic modulus of Diamond-Like Carbon thin films

Abstract

In contemporary technological landscapes, a multitude of applications necessitate the fabrication of structures and mechanisms at exceptionally diminutive scales, prominently within the realm of Nano and Micro-Electro-Mechanical Systems (NEMS and MEMS). The comprehension of mechanical properties inherent in materials tailored for deployment in these applications assumes paramount significance. Consequently, an array of methodologies has been devised with the explicit purpose of delineating material properties at nano or micrometric scales. This report delves into select scholarly contributions aligned with this objective, and specifically, it explores a technique leveraging the capabilities of Atomic Force Microscopy (AFM) for the precise determination of the elastic modulus of Diamond-Like Carbon (DLC) films. The exploration of such methodologies is indispensable for advancing the understanding of material behavior at minute scales and facilitating the development of innovative technologies with enhanced structural integrity and performance characteristics.