Vertical Schottky diode on (113) oriented homoepitaxial diamond

Abstract

Vertical Schottky diodes were fabricated on (113) oriented diamond substrates produced from thick heavily boron doped (NA ∼ 3.5 × 1020 cm−3) diamond layers grown on HPHT-grown synthetic Ib diamond crystals. The p+-substrates were overgrown by a low doped p-epilayer whose surface layer was compensated up to the depth of 0.1 to 0.3 μm. The surface was then oxygen terminated and covered by evaporated Mo/Au Schottky contacts. The bottom ohmic contact to p+-substrate was formed by Ti/Au bi-layer. Current- and capacitance-voltage characteristics of the realized diodes were measured at temperatures ranging from 25 to 180 °C. At room temperature, the realized diodes show high forward current densities JF = 100 A/cm2 and low differential ON-state specific resistance Ron_sp = 3.7 mΩ.cm2 at forward voltage VF = 4 V and a very low leakage (JR < 10−9 A/cm2) in the blocking regime. At 180 °C, forward characteristics significantly improve (JF = 5 kA/cm2, Ron_sp = 0.2 mΩ.cm2 at VF = 4 V) while the blocking characteristics remain almost unchanged (JR = 6 × 10−8 A/cm2 at VR = 4 V). The breakdown electric field is about 3 MV/cm and the rectification ratio keeps at the level of 1011. Characteristics of realized diodes, which are fully comparable to those of Schottky-pn diodes prepared on (111) oriented boron doped diamond, confirm the suitability of (113) orientation for realization of vertical diamond power devices.