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Abstract
In this letter, we proposed the use of active carbon pellet as substrates for the deposition of diamond films. A series of depositions were done on the different substrates prepared in different ways and compositions. The morphologies of the as-deposition films were analyzed by scanning electron microscopy. Raman spectroscopy was used to investigate the crystal structure and non-diamond impurities in the films deposited on various substrates. The ball-shaped diamond was evident, and the homogeneous and dense diamond films could be obtained by microwave plasma assisted CVD using acetone as C source diluted in hydrogen on the active carbon substrates cleaned in a solvent ultrasonic bath.
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