Abstract
In this work, we report the use of zeolites as substrates for the deposition of porous diamond films. Films were deposited in a hot-filament chemical vapor deposition (HFCVD) apparatus. The HFCVD system was fed with a mixture of methane (0.8%) with the balance being hydrogen. A series of depositions were done in the pressure range 20–120 Torr and at substrate temperature 880 °C. The morphologies of the as-deposited films were analyzed by scanning electron microscopy and show isolated diamond grains in the initial nucleation stages, which develop into a microporous film in the next stage and form a continuous film after long time deposition. Raman spectroscopy was used to investigate the crystal morphology, structure and non-diamond impurities in the films deposited at various growth conditions. The nature of the hydrogen bonding with sp 3 and sp 2 network and the quantitative analysis were done by Fourier transform infrared spectroscopy.
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