Abstract

Abstract This study presents a novel method to study ultrasonic surface vibrations and ultrasound influence on the surface topography image obtained by atomic force microscope (AFM). The vibrations of piezoelectric plate in the frequency range of 10–200 kHz were investigated. The experiments show the possibility of using the AFM for the detection of acoustic waves and the measurement of the amplitude of vibrations and the distribution of electric field in a piezoplate. Influence of the ultrasonic surface vibrations on AFM tip-surface interaction was noticed. Lateral surface vibrations reduced the tip-surface adhesion down to zero. Experimental results show that the AFM cantilever in the presence of vibrations has a lateral vibration mode coupled with a normal vibration mode. It increased the contrast of an image obtained in the lateral force mode.

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