Abstract
Flexible structures are the main components in many precision measuring and research systems. They provide miniaturization, repeatability, minimal damping, low measuring forces, and very high resolution. This article focuses on the modeling, development, and comparison of three typical flexible micro- nano-structures: flexible helicoids, atomic force microscopy (AFM) cantilevers, and concave notch hinges. Our theory yields results which allow us to increase the accuracy and functionality of these structures in new fields of application such as the modeling of helicoidal DNA molecules’ mechanics, the definition of instantaneous center of rotation in concave flexure notch hinges, and the estimation of the increase of spring constants and resolution at higher mode vibration in AFM cantilevers with an additional concentrated and end extended mass. We developed the original kinetostatic, reverse conformal mapping of approximating contours, and non-linear thermomechanical fluctuation methods for calculation, comparison, and research of the micromechanical structures. These methods simplify complicated solutions in micro elasticity but provide them with necessary accuracy. All our calculation results in this article and in all corresponding referenced author’s publications are in a good agreement with experimental and finite element modeling data within 10% or less.
Highlights
Flexible micro- and nano-helicoids are very sensitive to the stretching force and ambient temperature under which the helicoid proportionally untwists
Despite the decline in production of such systems in recent years due to the development of electronic systems with wide measurement range and atomic force microscopes (AFM) with micro-nano-cantilevers in quasi-static deformation, natural vibration and vibration at higher modes, flexible helicoidal strips continue to be of interest and use
AFM cantilevers are the main sensitive part of an atomic force microscope which works in a quasi-static mode and in a vibrating mode as well
Summary
Flexible micro- and nano-helicoids are very sensitive to the stretching force and ambient temperature under which the helicoid proportionally untwists These structures provide the basis for the design of Micromachines 2012, 3 extensometers, thermometers, precision measuring heads with visual readout at minimum resolution of order 50 nm, photoelectric automata for dimensional sorting with the measurement rate up to 10 measurement per second, and vibrating string transducers (multivibrators) with minimum resolution of order 5 nm [1]. Despite the decline in production of such systems in recent years due to the development of electronic systems with wide measurement range (inductive, capacitive) and atomic force microscopes (AFM) with micro-nano-cantilevers in quasi-static deformation, natural vibration and vibration at higher modes, flexible helicoidal strips continue to be of interest and use. A combined presentation of these devices in one article allows us to compare their features in the case of possible application to the measurement and research
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