Abstract
The ultramicrohardness of thin alloy films is determined by indentation experiments at very low loads. The indentation apparatus is briefly described. We measured the hardness of a number of pure metal films, either vapour deposited or magnetron sputtered. In addition, a detailed study was made of the composition dependence of the hardness of the six binary alloy systems of AgAuCu and AuCoNi. These films were prepared by high vacuum vapour deposition. The thickness of all the films was 1 μm. The hardness data were interpreted with the help of the metastable alloy phase diagram, e.g. as obtained by transmission electron microscopy. The results are discussed in terms of the blocking of the motion of dislocations, solid solution hardening, compound formation, grain size reduction due to alloying, and differences in atomic radii.
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