Abstract

Direct-write femtosecond laser nanostructuring of 300 nanometer thick a-Si:H films results in space-variant functional metasurfaces with form birefringence of up to ne-no=–0.5. Engineering the orientation of local optical axis allows implementing continuous phase profiles of nearly any optical element including arrays of polarization micro-converters and micro lenses, polarization gratings and computer generated holograms with continuous phase gradients of ~1 rad/µm.

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