Abstract
Miniaturization technology for creating three-dimensional structures is constantly advancing, reaching a processing accuracy of several µm. Therefore, it is questionable whether it is possible to obtain the stiffness of spring constant derived from macroscopic bending model and from macroscale parameters such as Young's modulus in this small region. To test the goodness of the macroscale model, we fabricated a micro-scale beam and an electrostatic actuator, applied an AC voltage to make the beam resonate, and measured the resonant frequency of the beam. The resonance frequencies were measured through changes in bias voltage. By the constant voltage dependence of the resonance frequency, we measured the soft-spring effect, and also measured the stiffness spring constant of the beam without the soft-spring effect. We demonstrate that the stiffness of a beam of a few µm can be accurately calculated from the macroscale analytical solution if the beam dimensions are known.
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