Abstract
This paper addresses a relatively simple method of measuring Young's modulus of electroplated nickel using an atomic force microscope. The thin layer of nickel to be measured is electroplated onto the tip side of an AFM silicon cantilever, whose Young's modulus and geometric dimensions are well defined from the manufacturer. The resonant frequency and quality factor of the electroplated AFM cantilever are measured by the tapping mode of the AFM and its spring constant is calculated using Sader's method. The spring constant of the electroplated cantilever is also calculated by using the laminar composite beam theory. Comparing two spring constants, Young's modulus of electroplated nickel is determined. The measured Young's modulus of nickel at the end of each plating step ranged between 148.04 GPa and 159.90 GPa with a relative uncertainty of 4.21%.
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