Abstract
A two-dimensional (2-D) fluid simulation applicable to high density plasma reactors was developed which couples gas flow with plasma transport in a self-consistent manner. Modified boundary conditions were used at the reactor walls to accommodate transport at low pressures. A modular approach circumvented the disparity in time scales and a quasi-neutral plasma assumption overcame the disparity in length scales. This approach allowed for a simulation tool that can execute rapidly on a desktop computer, and is, therefore, suitable for Technology Computer-Aided Design (TCAD). Simulation results for an electron cyclotron resonance (ECR) plasma system showed good agreement with experimental data on electron density and temperature as a function of plasma power and pressure. Also, the gas pressure drop in the reactor was predicted correctly by the simulation. Further simulation studies showed the effect of power and pressure on ion flux uniformity on a wafer substrate.
Published Version
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