Ultrasoft x-ray emission from a linear ECR plasma source

Abstract

Ultrasoft x-ray emission in the energy range 10–100 eV is observed from a linear electron cyclotron resonance (ECR) plasma system. ECR plasma is produced in a short cylindrical stainless steel (SS) chamber with a central axial magnetic field of 875 G, generated by two coils placed axially to have the first two ECR surfaces inside the experimental chamber. Plasma is produced in a pressure range of 2 × 10−5 mbar with hydrogen. Also, plasma is produced with net microwave power varying from 160 to 800 W at 2.45 GHz frequency from a magnetron. The waveguide from the magnetron to the vacuum vessel supports rectangular TE10 mode and the electromagnetic wave propagation in plasma is in extraordinary (X) mode. The ultrasoft x-ray emission is observed with a vacuum photodiode. The results clearly indicate a decrease in x-ray emission on increasing the working pressure and an increase in emission with an increase in the input microwave power. The experiments also ensure that the presence of a metal target enhances the intensity of soft x-rays generated in the ECR plasma system.