Abstract
We report the studies of magnetic tunnel junctions (MTJs) using epitaxially grown Fe2CrSi (FCS) as a bottom electrode. A tunnel magnetoresistance (TMR) ratio of 2.5% was obtained for MTJ at room temperature. The low TMR ratio is attributed to the oxidation of FCS at the interface with MgO barrier. With the insertion of 0.3 nm Mg layer between the FCS and MgO barrier layers, the TMR ratio increases to 8.1%. X-ray Photoelectron Spectroscopy results show that the FCS film is most likely terminated at Fe and Si atomic layers, which is found to be bonded to oxygen at the interface, while Cr remains at metallic state. Post-annealing effect shows that TMR first increases with annealing temperature (Ta) due to improvement in crystalline structure of MgO and top electrode and then decreases due to oxidation of the bottom electrode. The TMR finally disappears due to the depinning of top electrode induced by Mn diffusion at high Ta.
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