Tungsten Oxide (WO<sub>3</sub>) Films Prepared by Sol-Gel Spin-Coating Technique

Abstract

Tungsten oxide (WO3) is a transition metal oxide with a wide range of applications such as displays, rear-view mirrors, electrochromic (EC) smart windows and gas sensors. Many techniques were adopted for the fabrication of WO3, namely magnetron sputtering, spray pyrolysis and sol-gel synthesis techniques. In this work, WO3films were deposited on indium tin oxide (ITO) coated glasses by sol-gel spin-coating method. The film thickness was varied by depositing different number of layers. The WO3film thickness and optical transmittance were determined using step profilometer and ultraviolet-visible (UV-Vis) spectrophotometer, respectively. WO3film thicknesses increased from 38 nm to 606 nmwith increasing number of deposited layers.The optical transmittance of the WO3films in visible range decreased with increasing film thickness. The optical transmittance were at least 70 % up to 10 deposited layers.WO3is a promising EC material in the application ofEC devices (ECDs).The application of WO3in the EC devices will be discussed.