Abstract
This paper describes current circumstances on applications of the excimer laser in Japan from the viewpoints of Tosei Electrobeam Co., Ltd. as a job shop who has the excimer laser system. 1) 20 industrial excimer lasers are running to date, most of which are adopted to precise process of polymers. 2) 40% of those samples processed in the job shop are made of metals and ceramics. Processing of these inorganic mmaterials potentially calls for the excimer laser system.This paper describes current circumstances on applications of the excimer laser in Japan from the viewpoints of Tosei Electrobeam Co., Ltd. as a job shop who has the excimer laser system. 1) 20 industrial excimer lasers are running to date, most of which are adopted to precise process of polymers. 2) 40% of those samples processed in the job shop are made of metals and ceramics. Processing of these inorganic mmaterials potentially calls for the excimer laser system.
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