Micromanufacturing polyimide by TEA CO2 laser vs. excimer laser

Abstract

A TEA CO2 laser fast micromanufacturing system with the wavelength of 9300 nm and an excimer laser micromanufacturing system with the wavelength of 248 nm were used to drill holes in polyimide. Holes with diameters smaller than 0.02 mm were achieved by the TEA CO2 laser system, while the drilling speed was about 20 to 40 times faster than the excimer laser system. Also, the properties of the holes drilled by TEA CO2 laser were compared to those drilled by excimer laser, including size limitation, half angle taper, hole shape resolution, and inside wall quality. Based on the analysis, we found that polyimide micromanufacturing by TEA CO2 laser has the advantages of fast processing speed, low processing cost, and relatively good hole quality so that TEA CO2 laser can be widely used in some fields of laser micromanufacturing.A TEA CO2 laser fast micromanufacturing system with the wavelength of 9300 nm and an excimer laser micromanufacturing system with the wavelength of 248 nm were used to drill holes in polyimide. Holes with diameters smaller than 0.02 mm were achieved by the TEA CO2 laser system, while the drilling speed was about 20 to 40 times faster than the excimer laser system. Also, the properties of the holes drilled by TEA CO2 laser were compared to those drilled by excimer laser, including size limitation, half angle taper, hole shape resolution, and inside wall quality. Based on the analysis, we found that polyimide micromanufacturing by TEA CO2 laser has the advantages of fast processing speed, low processing cost, and relatively good hole quality so that TEA CO2 laser can be widely used in some fields of laser micromanufacturing.