Abstract
A tuning system for large-area surface-wave plasma source is proposed. The system is based on T-junction tuning elements applied directly on the plasma-dielectric resonator and it provides remarkable control of microwave discharges sustained on large areas. Along with the control of matching, it enables also the control of discharge diameter and, most importantly, control of the radial plasma density profile. Considering its principle of operation, the system is applicable to any large-area guided-wave plasma source, magnetized or unmagnetized.
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