Abstract
Measurements are reported on an inductively coupled large-area (71×61 cm2) plasma source driven by a 13.56 MHz traveling wave. Launching a traveling wave eliminates standing wave effects to obtain a uniformly excited processing plasma. The driving coil consists of a series connection of eight parallel rods, embedded in the plasma inside thin quartz tubes for efficient power delivery. The network required to launch a traveling wave through the driving coil is described. Our measurements confirm that a radio frequency traveling wave is launched and that a high-density plasma is produced.
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