Abstract
Measurements are reported on an inductively coupled large-area (71×61 cm2) plasma source driven by a 13.56 MHz traveling wave. Launching a traveling wave eliminates standing wave effects to obtain a uniformly excited processing plasma. The driving coil consists of a series connection of eight parallel rods, embedded in the plasma inside thin quartz tubes for efficient power delivery. The network required to launch a traveling wave through the driving coil is described. Our measurements confirm that a radio frequency traveling wave is launched and that a high-density plasma is produced.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
