Time-of-flight ERDA of dual implanted metals

Abstract

Heavy Ion Time-of-Flight Recoil Spectrometry has been used to measure the implant distributions and dose in metal surfaces subject to dual ion implantation. Polished specimens of type 304 stainless steel were simultaneously implanted with both metallic and gaseous species produced from a modified metal vapour vacuum arc ion source (MEVVA). The combination of ions used were Al + O, Cr + O, Zr + O and Ti + N. Results show that the retained doses differ significantly from the expected applied values, and metal-gas implant ratios. In particular, the metal-oxygen systems show an anomalously low retained metal dose.