Time dependence and spatial distribution of the deposition rate of YBa2Cu3O7 thin films in 90° off-axis sputtering

Abstract

We have examined the time dependence and spatial distribution of the deposition rate of YBa2Cu3O7 (YBCO) thin films in 90° off-axis radio frequency planar magnetron sputtering throughout the life of a target. We have found that although the amount of YBCO sputtered from the target is constant, the amount of YBCO deposited on the substrate decreases linearly over time. Furthermore, the time dependence of the deposition rate changes at different positions on the substrate. The changes in the deposition rate at any point along the substrate as a function of time can be explained by the change in the angular distribution of the sputtered particles that is caused by changes in the target erosion groove geometry, and the decrease in the kinetic energy of sputtered particles that is indicated by the decrease in the self-bias voltage over time.