Abstract

This paper describes the analytical model of threshold voltage and I-V characteristics of cylindrical, surrounding - electrolyte ISFET realized by replacing the surrounding metal gate of cylindrical / surrounding gate MOSFET with a series combination of a reference electrode and an electrolyte solution. The standard equations of cylindrical/ surrounding gate MOSFET, obtained by solving cylindrical form of Poisson's equation have been extended to cylindrical ISFET and then integrated with the electrolyte-oxide interface potential, dependence on pH of electrolyte solution. The analysis of charge and potential profiles related to electrolyte solution is carried out by solving Poisson-Boltzmann's equation in cylindrical coordinates.

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