Abstract
Abstracts 65.70 - 42.60K - 81.70 Recently small-displacement measu- rement technique have made considerableprogress mainly as a result of the multipleapplications in gravitational wavesdetec- tion [1], noncontact measurement of surface acoustic waves [2], nondestructive testing [3,4], photoacoustic spectroscospy and mi-croscopy [4,5], etc. A new application ofthis technique in the field of thermodis- placement imaging is presented in this pa-per. Thermoelastic waves excited by means of Joule heating in thin layers were used for visualizing the complex profiles of si-licon membranes used in the fabrication of sensors, actuators and frequency selectiveelements [6]. We used an one-arm phase-op- tical bridge [3] for measuring the thermo-eleastic displacements. The samples (which we worked on) were polished, 250 Rm thick (001)-cut Si plates. Thin membranes of 25 Rm with different geometrical shapes (Fig. Ib) were obtained through selective etch- ing. Narrow 330
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