Abstract
The effects of heating on both the reflectivity and layered structures of Mo/Si and Mo/C/Si/C multilayers were evaluated. The CuK α x-ray reflectivity and periodic length of the Mo/Si multilayer markedly decreased after heating at above 300°C, while those of the Mo/C/Si/C multilayers changed only slightly even after heating at up to 700°C. Transmission electron microscopy observations revealed markedly less thermally induced deterioration in the Mo/C/Si/C multilayers than in Mo/Si multilayer, indicating that Mo/C/Si/C multilayers have better heat resistance than Mo/S multilayer.
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