Thermal phonon transport in silicon nanowires and two-dimensional phononic crystal nanostructures

Abstract

Thermal phonon transport in silicon nanowires (Si NWs) and two-dimensional phononic crystal (2D PnC) nanostructures was investigated by measuring thermal conductivity using a micrometer-scale time-domain thermoreflectance. The impact of nanopatterning on thermal conductivity strongly depends on the geometry, specularity parameter, and thermal phonon mean free path (MFP) distribution. Thermal conductivities for 2D PnC nanostructures were found to be much lower than that for NWs with similar characteristic length and surface-to-volume ratio due to stronger phonon back scattering. In single-crystalline Si, PnC patterning has a stronger impact at 4 K than at room temperature due to a higher specularity parameter and a longer thermal phonon MFP. Nanowire patterning has a stronger impact in polycrystalline Si, where thermal phonon MFP distribution is biased longer by grain boundary scattering.