Abstract
Two topics in sputtering are discussed. One is low energy sputtering and the other is non-linear sputtering. Based on the assumption that transient phenomena are dominant in the low-energy sputtering, a modified version of Sigmund's formula is derived. The same approach is successfully applied to analysis of the angular distribution of sputtered atoms. The formula obtained is shown to predict well the heart-shaped angular distribution for normal incidence In order to explain the non-linear effect of sputtering yields in heavy-ion bombardment on high Z material, a shock wave model is applied. The present approach has shown that the sputtering yield is nearly proportional to S n (E) 3 2 , not to S n( E) , where S n( E) is the nuclear stopping cross section. The non-linear Monte Carlo simulation is also performed in order to investigate the difference between linear cascade and non-linear cascade.
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