Abstract
A Monte Carlo simulation is used to study the angular distribution of sputtered atoms from Fe and Lu targets bombarded by Ne, Ar and Kr ions at energies of 0.2 keV and 0.5 keV. The sputtered atoms are distinguished as primary knock-on atoms (PKA) and secondary knock-on atoms (SKA) in the simulation. It is found that the angular distribution of the PKAs tends to an under-cosine shape, while the angular distribution of the SKAs shows either a cosine shape or an over-cosine shape. The calculations also give the contributions of the PKAs and the SKAs to sputtering yields. Based on the computations, the mechanism of the under-cosine angular ejection distribution at low energy sputtering is discussed.
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