Abstract
Field emission of electrons enables the patterning process in field-emission scanning probe lithography. A nanotip mounted at an active cantilever is used as an electron field emitter. Since the field enhancement at the tip apex is crucial for the Fowler–Nordheim emission current, the electric field and its enhancement based on a finite-element method (FEM) calculation are studied. The influences of the tip radius, the tip opening angle, and the tip–sample distance are considered. The numerically obtained enhancement factor γp is compared to various models found in the literature. Only three of them agree with the FEM data well. For small ratios of tip–sample distance and tip radius, the data resemble a “hemisphere on a post” model, and for larger ratios, it is better modeled by a “hemiellipsoid on a plane” model despite its “hemisphere on a cone” shape.
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