Abstract
The results of studies relating to the use of porous silicon as the basis for the creation of nanostructured getter layers for MEMS are presented. New technical solutions, in which the porous silicon with pores of micro- and nanometer range is used as a matrix for the deposition of reactive metals or metal alloys, were developed. The research results can be used to create getters for MEMS, as well as in other areas which require the creation of structures with a developed surface.
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