Abstract
采用溶胶-凝胶法在n型Si(100)衬底上沉积Li-N双掺杂ZnO薄膜，经X射线衍射和扫描电镜图片分析，所制备薄膜具有多晶纤锌矿结构和高的c轴择优取向.室温下霍尔效应测试结果显示Li-N双掺杂ZnO薄膜具有p型导电特性.在Li掺杂量为15.0at%，Li/N（摩尔比）为1∶1，700℃退火等优化条件下得到的最佳电学性能结果是：电阻率为0.34 Ω·cm，霍尔迁移率为16.43 cm2/V·s，载流子浓度为2.79×1019 cm-3</s
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