Abstract
ZnO films thin films have been deposited on glass and three different LiNbO3 (LNO) substrates at room temperature using radio frequency magnetron sputtering. The structure and optical properties of the films were investigated by X-ray diffraction (XRD), optical transmission spectroscopy and spectro-photometry. XRD analysis shows that all the films are hexagonal wurtzite structure, and there is compressive strain in the films. Typical optical transmittance values in the order of 80% were obtained for all the films, and the band gaps are in the range of 3.273–3.282 eV. The Photo-Luminescence (PL) spectra results indicate that the type of substrate affects the photoluminecence of ZnO films significantly, and the films on rotated Y-cut 128° LNO substrates have strong UV emission at room temperature.
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