Abstract
Effect of the energy density on the composition, morphology and deposition rate of the bioglass thin films deposited by pulsed laser was studied by energy dispersive spectroscopy (EDS), scanning electron microscopy (SEM), X-ray diffraction (XRD) and crystal lattice monitor. There is slight compositional difference between the film and the target at lower energy density. Morphology of the films is compact with the particles on the surface of them. Structure of the films is amorphous glass and the size of the particles increases with the energy density. Deposition rate increases with the energy density and the energy density threshold of the film growth is about 2.5J/cm2.
Published Version
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